The Alpha-Step D-600 offers high resolution 2D & 3D profiling, 2D stress, profile stitching, and many more features.
The system includes an innovative optical lever sensor technology that provides the highest vertical range at 1200 µm, sub-Angstrom resolution plus low force, 0.03 to 15 mg.
It has ability to measure a wide range of applications, from nanometer to millimeter steps, high resolution roughness, soft materials, and thin film stress
200 mm motorized stage with 150 x 178 mm X-Y range of motion.